KLA-Tencor was formed in 1997 through the merger of KLA Instruments and Tencor Instruments, two companies in the semiconductor equipment and yield management systems industry.
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11 Facts About KLA-Tencor
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KLA-Tencor initially focused on making precise measurements of semiconductor film layer thickness, and in 1984, developed laser-scanning technology to detect particle and other contamination.
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In February 1998, KLA-Tencor acquired Freiburg, Germany-based Nanopro GmbH, a company that used advanced interferometric technology for wafer shape and thickness measurements.
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In February 2000, KLA-Tencor acquired Austin, Texas-based Finle Technologies, Inc, a developer of lithography modeling and analysis software.
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In 2004, KLA-Tencor acquired surface inspection system manufacturer Candela Instruments, Inc and the Wafer Inspection Systems business of Inspex, Inc.
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In 2007, KLA-Tencor acquired lithography and plasma etch products manufacturer OnWafer Technologies, temperature monitoring firm SensArray Corporation and process control and metrology company Therma-Wave Corporation.
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In 2010, KLA-Tencor acquired technology hardware company Ambios Technology, Inc.
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In 2018, KLA-Tencor acquired the Nano Indenter product line from Keysight Technologies.
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In March 2018, KLA-Tencor announced an agreement to acquire Yavne, Israel-based automated optical inspection equipment vendor Orbotech for approximately $3.
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On January 10,2019, KLA-Tencor announced that they were changing their name to KLA Corporation.
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KLA-Tencor operates a second North American headquarters in Ann Arbor, Michigan.
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